Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays

Tintelott, Marcel; Pachauri, Vivek; Ingebrandt, Sven; Vu, Xuan Thang (Corresponding author)

Basel : MDPI (2021)
Contribution to a book, Journal Article

In: Sensors
Volume: 21
Issue: 15
Page(s)/Article-Nr.: 5153

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