Lab center for micro and nanotechnology at Walter-Schottky-Haus

Technical facilities
Exterior view of the building Copyright: © IWE 1
Central corridor within the clean room area Copyright: © IWE 1
Oven and photoresist spin coater Copyright: © IWE 1
Mask aligner Copyright: © IWE 1
Electroplating basins Copyright: © IWE 1
Interior of an electron beam evaporator Copyright: © IWE 1
Sputtering system Copyright: © IWE 1
Sputtering system 2 Copyright: © IWE 1
Plasma dry etcher Copyright: © IWE 1
Profilometer Copyright: © IWE 1
Parylene coater Copyright: © IWE 1
 
Laboratory Central Laboratory for Micro- and Nanotechnology
Location RWTH Aachen University
Otto-Blumenthal-Str. 4
52074 Aachen
Lab responsibility Birger Berghoff, Jochen Heiss, Frank Jessen

Contact

Jochen Heiss © Copyright: IWE1

Name

Jochen Heiss

Technischer Leiter des ZMNT

Phone

work
+49 241 80 23238

Email

E-Mail