Approach for reducing the interconnection height between differentchips in pressure sensor systems

Auerbach, Germany / Verlag Wissenschaftliche Scripten (2016) [Contribution to a book, Contribution to a conference proceedings]

Smart Systems Integration : International Conference and Exhibition on Integration Issues of Miniaturized Systems ; Munich, Germany, 9-10 March 2016 / Prof. Dr. T. Gessner (ed., Fraunhofer Institute for Electronic Nano Systems ENAS, Germany) ; organized by: Mesago Messe Frankfurt GmbH, Germany ; co-organizer: Fraunhofer Institute for Electronic Nano Systems ENAS, Germany, Fraunhofer Institute for Reliability and Microintegration IZM, Germany

Authors

Selected Authors

Fischer, Roland
Müntjes, Jutta A.
Mokwa, Wilfried

Identifier

  • REPORT NUMBER: RWTH-2016-11656