Herstellungsprozesse für siliziumbasierte Mikrosysteme



Prof. Dr. rer. nat. Wilfried Mokwa



The lecture „Herstellungsprozesse für siliziumbasierte Mikrosysteme“ (engl.: Fabrication processes for silicon-based microsystems) aims to transmit the basics of processing steps in microsystems technology and micro- and nanoelectronics in general. The emphasis is put on a broad presentation of the most common methods.


In this course you should

  • get to know silicon as a raw material
  • gain basic knowledge in lithography, layer deposition and patterning
  • become familiar with techniques of surface- and bulk micromachining as well as the LIGA fabrication technology as a basis of microsystems technologies
  • explore packaging of microsystems
  • get insight into the setup and operating mode of machines used for those processes
  • deepen your knowledge in additional exercises

Topics of the lecture

  • silicon as a raw material
  • clean-room technology
  • vacuum technology
  • oxidation, ion implantation, rapid thermal processing
  • lithography
  • plasma phenomena
  • patterning
  • layer deposition
  • surface- and bulk micromachining
  • packaging
  • molded interconnect device (MID)




Recommended literature

  • W. Menz, P. Bley "Mikrosystemtechnik für Ingenieure" VCH-Verlagsgesellschaft
  • T. Elbel "Mikrosensorik" Studium Technik
  • S. M. Sze "Physics of Semiconductor Devices" John Wiley & Sons
  • S. M. Sze "VLSI Technology" Mac Graw Hill
  • Heuberger "Mikromechanik" Springer-Verlag
  • S. Büttgenbach "Mikromechanik" Teubner Studienbücher
  • M. Madou "Fundamentals of Microfabrications" CRC Press
  • U. Hilleringmann "Mikrosystemtechnik auf Silizium" B. G. Teubner Stuttgart
  • M. Elwenspoek "Silicon Micromachining" Cambridge Univ. Pr.
  • G. Schumicki "Prozesstechnologie" Springer-Verlag
  • H. Xiao, "Introduction to Semiconductor Manufacturing Technology" Prentice Hall
  • G. Gerlach, W. Dötzel, "Einführung in die Mikrosystemtechnik" Carl Hanser Verlag
  • N. Schwesinger, C. Dehne, F. Adler, "Lehrbuch der Mikrosystemtechnik" Oldenburg Wissenschaftsverlag